Fundamentals of silicon integrated device technology  volume 1 : oxidation, diffusion and epitaxy 
edited by R. M. Burger, R. P. Donovan 
 - New Jersey  Prentice-Hall Inc.  1967 
 - xiv, 495 s.  res., graf.  24 cm. 
 - Prentice-Hall, Inc.  Electrical engineering series Solid state physical electronics series .
<br/><br/>İndeks var. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics.<br/>Silicon.
<br/><br/><label>Dewey Class. No.: </label>621.381 FUN 1967