TY  - BOOK
AU  - Berry, Robert W.
AU  - Hall, Peter M.
AU  - Harris, Murry T.
TI  - Thin film technology
U1  - 621.381 BER 1968 
PY  - 1996///8
CY  - New York
PB  - Van Nostrand
KW  - Integrated circuits
KW  - Thin film circuits
KW  - Thin films
N1  - Kaynakça var
ER  -