TY  - BOOK
AU  - Glang,Reinhard
AU  - Maissel,Leon I.
TI  - Handbook of thin film technology,
AV  - TK7871.15.F5 H34
U1  - REF 621.38173 HAN 1970 
PY  - 1970///]
CY  - New York
PB  - McGraw-Hill Book
KW  - Thin film devices
N1  - Includes bibliographies and indexes
ER  -