| 000 | 00692nam a2200205 4500 | ||
|---|---|---|---|
| 041 | _aeng | ||
| 044 | _aAmerika | ||
| 082 | _a621.381 FUN 1967 | ||
| 090 | _a621.381 FUN 1967 | ||
| 245 |
_aFundamentals of silicon integrated device technology _bvolume 1 : oxidation, diffusion and epitaxy _cedited by R. M. Burger, R. P. Donovan |
||
| 260 |
_aNew Jersey _bPrentice-Hall Inc. _c1967 |
||
| 300 |
_axiv, 495 s. _bres., graf. _c24 cm. |
||
| 440 |
_aPrentice-Hall, Inc. _pElectrical engineering series |
||
| 440 | _aSolid state physical electronics series | ||
| 504 | _aİndeks var. | ||
| 650 | _aMicroelectronics. | ||
| 650 | _aSilicon. | ||
| 700 | _aBurger, R. M. | ||
| 700 | _aDonovan, R. P. | ||
| 999 |
_c12515 _d12515 |
||