000 00646nam a2200217 4500
041 _aeng
044 _aAmerika
082 _a621.381 BER 1968
090 _a621.381 BER 1968
100 _aBerry, Robert W.
245 _aThin film technology
_cRobert W. Berry, Peter M. Hall, Murray T. Harris
260 _aNew York
_bVan Nostrand
_c19968
300 _axxi, 706 s.
_bres., şkl., şema., graf.
_c24 cm.
440 _aThe Bell Telephone Laboratories series
504 _aKaynakça var.
650 _aIntegrated circuits.
650 _aThin film circuits.
650 _aThin films.
700 _aHall, Peter M.
700 _aHarris, Murry T.
999 _c15529
_d15529