000 00674nam a2200217 4500
035 0 0 _9(DLC) 73079497
041 0 0 _aeng
050 0 0 _aTK7871.15.F5
_bH34
082 0 0 _aREF 621.38173 HAN 1970
090 0 0 _aREF 621.38173 HAN 1970
245 0 0 _aHandbook of thin film technology,
_cedited by Leon I. Maissel and Reinhard Glang.
260 0 0 _aNew York
_bMcGraw-Hill Book
_c[1970]
300 0 0 _a1 v. (various pagings)
_bill.
_c23 cm.
440 0 0 _aMcGraw-Hill Book
504 0 0 _aIncludes bibliographies and indexes
650 0 0 _aThin film devices.
700 1 0 _aGlang, Reinhard
_eed.
700 1 0 _aMaissel, Leon I.
_eed.
999 _c20803
_d20803